TaCl5 — Properties & Data | MatWorld

TaCl5

Name: TaCl5
Brand: MatWorld

ceramic

· TaCl5

Tantalum pentachloride (TaCl5) is a halide ceramic precursor compound primarily used as a volatile source material rather than a final structural ceramic. In industry, it serves as a starting reagent for chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes to synthesize tantalum oxide coatings and thin films, leveraging its high reactivity and vaporization characteristics. Engineers select TaCl5 over alternative tantalum precursors when precise, conformal thin-film deposition is required on complex geometries, particularly in semiconductor fabrication and protective coating applications.

CVD/ALD precursorSemiconductor thin filmsTantalum oxide coatingsMicroelectronics manufacturingCorrosion-resistant coatingsHigh-temperature barrier layers

Compliance & Regulations

?Conflict Free?RoHS?REACH?TSCA?Prop 65

Units:

si imperial

Property	Value	Unit	Conditions	Source
Density(ρ)	3.768	kg/m³	DFT · OptB88vdW

Verified Unverified Low confidence (<80%) Link to source

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Carrier

Property	Value	Unit	Conditions
Band Gap(Eg)	2.655	eV	DFT · OptB88vdW
High-Frequency Dielectric Constant (ε∞)(ε∞)	4.936	-	DFT · OptB88vdW
Magnetic Moment(μB)	0.000	µB	DFT · OptB88vdW
Thermoelectric Power Factor(PF)2 entries	0.000143	W/(m·K²)	DFT · OptB88vdW · n-type · 1e20 cm⁻³ · 327°C
↳	0.000207	W/(m·K²)	DFT · OptB88vdW · p-type · 1e20 cm⁻³ · 327°C
Seebeck Coefficient(S)2 entries	-386.3	μV/K	DFT · OptB88vdW · n-type · 1e20 cm⁻³ · 327°C
↳	313.3	μV/K	DFT · OptB88vdW · p-type · 1e20 cm⁻³ · 327°C

N entriesMultiple entries per property — large groups are collapsed; click a summary row to expand. Use filters above to narrow by form, heat treatment, basis, or test environment.

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Method

Property	Value	Unit	Conditions
Energy Above Hull(ΔEhull)	0.000	eV/atom	DFT · OptB88vdW
Formation Energy(ΔHf)2 entries	-1.375	eV/atom	DFT · OptB88vdW
↳	-1.484	eV/atom	Measured

N entriesMultiple entries per property — large groups are collapsed; click a summary row to expand. Use filters above to narrow by form, heat treatment, basis, or test environment.

Verified Unverified Low confidence (<80%) Link to source

Reference data from cited sources. Not verified or certified by MatWorld Inc. Verify against the source before use in design. Terms: engineering data

Regulatory Screening

Environmental

RoHS, REACH, and Prop 65 statuses are validated against official substance lists (ECHA SVHC Candidate List, OEHHA Prop 65, RoHS Annex II). Other regulations are estimated from composition and material classification. All screening is a starting point for due diligence — always verify with your supplier before making compliance decisions.

TaCl5

Physical Properties

Electrical Properties

Other Properties

Regulatory Screening

Environmental