XeF2 — Properties & Data | MatWorld

XeF2

ceramic

· JVASP-1936· XeF2

Xenon difluoride (XeF₂) is a molecular ceramic compound formed from the reaction of xenon and fluorine, classified as an interhalogen ceramic with a layered crystal structure. While not commonly used as a structural engineering material, XeF₂ is valued in specialized industrial and research applications as a selective etchant for silicon and other materials, as well as in fluorinating chemistry and plasma processing. Engineers and materials scientists select XeF₂ primarily for precision microfabrication and chemical synthesis contexts where its strong oxidizing and fluorinating properties provide advantages over conventional alternatives, though its handling requirements (toxicity, volatility) and cost limit its scope compared to conventional ceramics.

silicon etching and microfabricationsemiconductor processingfluorination chemistryplasma source materialsspecialty chemical synthesisresearch and laboratory applications

Compliance & Regulations

?Conflict Free?RoHS?REACH?TSCA?Prop 65

Units:

si imperial

Property	Value	Unit	Conditions
Bulk Modulus(K)	2,929.8	ksi	DFT · OptB88vdW
Poisson's Ratio(ν)	0.2600	-	DFT · OptB88vdW
Shear Modulus(G)	1,737.6	ksi	DFT · OptB88vdW

Verified Unverified Low confidence (<80%) Link to source

Property	Value	Unit	Conditions	Source
Density(ρ)	0.1631	lb/in³	DFT · OptB88vdW

Verified Unverified Low confidence (<80%) Link to source

Filter by

Method

Carrier

Property	Value	Unit	Conditions
Band Gap(Eg)2 entries	2.302	eV	DFT · OptB88vdW
↳	4.494	eV	DFT · TBmBJ
Dielectric Constant (Relative Permittivity)(εr)	6.025	-	DFT · OptB88vdW
High-Frequency Dielectric Constant (ε∞)(ε∞)2 entries	3.741	-	DFT · OptB88vdW
↳	2.706	-	DFT · TBmBJ
Electron Effective Mass(m*e)	1.527	me	DFT · OptB88vdW · 27°C
Hole Effective Mass(m*h)	2.370	me	DFT · OptB88vdW · 27°C
Magnetic Moment(μB)	0.000	µB	DFT · OptB88vdW
Piezoelectric Modulus(eij)	0.000	C/m²	DFT · OptB88vdW
Thermoelectric Power Factor(PF)2 entries	0.00142	W/(m·K²)	DFT · OptB88vdW · n-type · 1e20 cm⁻³ · 327°C
↳	0.00181	W/(m·K²)	DFT · OptB88vdW · p-type · 1e20 cm⁻³ · 327°C
Seebeck Coefficient(S)2 entries	-299.7	μV/K	DFT · OptB88vdW · n-type · 1e20 cm⁻³ · 327°C
↳	382	μV/K	DFT · OptB88vdW · p-type · 1e20 cm⁻³ · 327°C
Spectroscopic Limited Maximum Efficiency (SLME)(SLME)	0.000	%	DFT · TBmBJ

N entriesMultiple entries per property — large groups are collapsed; click a summary row to expand. Use filters above to narrow by form, heat treatment, basis, or test environment.

Verified Unverified Low confidence (<80%) Link to source

Property	Value	Unit	Conditions	Source
Energy Above Hull(ΔEhull)	0.000	eV/atom	DFT · OptB88vdW
Formation Energy(ΔHf)	-0.5645	eV/atom	DFT · OptB88vdW

Verified Unverified Low confidence (<80%) Link to source

Reference data from cited sources. Not verified or certified by MatWorld Inc. Verify against the source before use in design. Terms: engineering data

Regulatory Screening

Environmental

RoHS, REACH, and Prop 65 statuses are validated against official substance lists (ECHA SVHC Candidate List, OEHHA Prop 65, RoHS Annex II). Other regulations are estimated from composition and material classification. All screening is a starting point for due diligence — always verify with your supplier before making compliance decisions.

XeF2

Mechanical Properties

Physical Properties

Electrical Properties

Other Properties

Regulatory Screening

Environmental