TiSi2
metal· TiSi2
TiSi2 is a titanium silicide intermetallic compound that combines titanium and silicon in a hard, ceramic-like phase with metallic character. It is primarily used in semiconductor device fabrication as a contact material and diffusion barrier in integrated circuits, where it provides low electrical resistivity and excellent thermal stability at the silicon-metal interface. TiSi2 is valued in microelectronics for its ability to maintain structural integrity during high-temperature processing steps and its compatibility with standard silicon manufacturing, making it a preferred choice over alternatives like TaSi2 or WSi2 in many legacy and current semiconductor nodes.
semiconductor contactsintegrated circuit manufacturingdiffusion barriershigh-temperature metallizationinterconnect technologymicroelectronics fabrication
Compliance & Regulations
?EAR?Conflict Free?RoHS?REACH?TSCA?Prop 65
| Property | Value | Unit | Conditions | Source | |
|---|---|---|---|---|---|
Bulk Modulus(K)3 entries | — | ksi | — | — | |
| ↳ | — | ksi | — | — | |
| ↳ | — | ksi | — | — | |
Elastic Compliance Tensor(Sij) | Matrix (redacted) | 1/GPa | — | — | |
Elastic Anisotropy(AU) | — | - | — | — | |
Elastic Stiffness Tensor(Cij) | Matrix (redacted) | ksi | — | — | |
Poisson's Ratio(ν)2 entries | — | - | — | — | |
| ↳ | — | - | — | — | |
Shear Modulus(G)3 entries | — | ksi | — | — | |
| ↳ | — | ksi | — | — | |
| ↳ | — | ksi | — | — |
N entriesMultiple entries per property — large groups are collapsed; click a summary row to expand. Use filters above to narrow by form / heat treatment / basis.
Verified Unverified Low confidence (<80%) Link to source
| Property | Value | Unit | Conditions | Source | |
|---|---|---|---|---|---|
Density(ρ) | — | lb/in³ | — | — |
Verified Unverified Low confidence (<80%) Link to source
| Property | Value | Unit | Conditions | Source | |
|---|---|---|---|---|---|
Band Gap(Eg) | — | eV | — | — | |
Magnetic Moment(μB) | — | µB | — | — | |
Seebeck Coefficient(S) | — | µV/K | — | — |
Verified Unverified Low confidence (<80%) Link to source
| Property | Value | Unit | Conditions | Source | |
|---|---|---|---|---|---|
Energy Above Hull(ΔEhull) | — | eV/atom | — | — | |
Formation Energy(ΔHf)2 entries | — | eV/atom | — | — | |
| ↳ | — | eV/atom | — | — |
N entriesMultiple entries per property — large groups are collapsed; click a summary row to expand. Use filters above to narrow by form / heat treatment / basis.
Verified Unverified Low confidence (<80%) Link to source
Regulatory Screening
Environmental
Export Control
RoHS, REACH, and Prop 65 statuses are validated against official substance lists (ECHA SVHC Candidate List, OEHHA Prop 65, RoHS Annex II). Other regulations are estimated from composition and material classification. All screening is a starting point for due diligence — always verify with your supplier before making compliance decisions.