MoF6

metal
· MoF6

MoF6 (molybdenum hexafluoride) is a volatile inorganic compound classified as a metal fluoride, though it exhibits significant covalent character and exists as a molecular species under standard conditions rather than as a traditional metallic solid. This compound is primarily encountered in specialized chemical processing and semiconductor manufacturing contexts, where it serves as a fluorinating agent and precursor material; its high reactivity and volatility make it valuable for thin-film deposition, CVD (chemical vapor deposition) processes, and uranium enrichment applications in the nuclear fuel cycle. MoF6 is notable for its use in niche industrial chemistry rather than structural applications, and engineers would select it specifically when its unique fluorinating capability and volatility are advantageous—such as in high-purity fluorine-based reactions or as a source material for molybdenum-containing coatings—rather than for bulk mechanical or load-bearing roles.

semiconductor CVD processinguranium enrichment (UF6 production pathway)fluorination reagentthin-film depositionspecialty chemical synthesiscorrosive-environment coatings

Compliance & Regulations

?EAR?Conflict Free?RoHS?REACH?TSCA?Prop 65
PropertyValueUnitConditionsSource
Bulk Modulus(K)
ksi
Poisson's Ratio(ν)
-
Shear Modulus(G)
ksi
Verified Unverified Low confidence (<80%) Link to source
PropertyValueUnitConditionsSource
Density(ρ)
lb/in³
Verified Unverified Low confidence (<80%) Link to source
PropertyValueUnitConditionsSource
Band Gap(Eg)
eV
Dielectric Constant (Relative Permittivity)(εr)2 entries
-
-
Electronic Dielectric Tensor(ε∞)
Matrix (redacted)
-
Total Dielectric Tensor(ε)
Matrix (redacted)
-
Piezoelectric Modulus(eij)
C/m²
Seebeck Coefficient(S)
µV/K
N entriesMultiple entries per property — large groups are collapsed; click a summary row to expand. Use filters above to narrow by form / heat treatment / basis.
Verified Unverified Low confidence (<80%) Link to source
PropertyValueUnitConditionsSource
Energy Above Hull(ΔEhull)
eV/atom
Formation Energy(ΔHf)
eV/atom
Verified Unverified Low confidence (<80%) Link to source

Regulatory Screening

Environmental

Export Control

RoHS, REACH, and Prop 65 statuses are validated against official substance lists (ECHA SVHC Candidate List, OEHHA Prop 65, RoHS Annex II). Other regulations are estimated from composition and material classification. All screening is a starting point for due diligence — always verify with your supplier before making compliance decisions.
MoF6 — Properties & Data | MatWorld