Hafnium oxide (HfO₂) is a high-k ceramic compound widely used as a gate dielectric in advanced semiconductor devices, where it replaces traditional silicon dioxide to enable continued transistor scaling below 28 nm process nodes. It is also employed in optical coatings, thermal barrier applications, and nuclear fuel cladding due to its high melting point, chemical stability, and radiation resistance. Engineers select HfO₂ over alternatives like SiO₂ when higher dielectric constant and greater physical thickness (for equivalent capacitance) are needed to reduce gate leakage current while maintaining electrostatic control in nanoscale CMOS and emerging memory technologies.
Compliance & Regulations
| Property | Value | Unit | Conditions | Source | |
|---|---|---|---|---|---|
Bulk Modulus(K)2 entries | 274.0 | GPa | — | ||
| ↳ | 274.0 | GPa | — | ||
Elastic Compliance Tensor(Sij) | Matrix (redacted) | 1/GPa | — | ||
Elastic Anisotropy(AU) | 0.2334 | - | — | ||
Elastic Stiffness Tensor(Cij) | Matrix (redacted) | Pa | — | ||
Poisson's Ratio(ν) | 0.3504 | - | — | ||
Shear Modulus(G)2 entries | 91.06 | GPa | — | ||
| ↳ | 91.06 | GPa | — |
| Property | Value | Unit | Conditions | Source | |
|---|---|---|---|---|---|
Density(ρ) | 18.34 | kg/m³ | — |
| Property | Value | Unit | Conditions | Source | |
|---|---|---|---|---|---|
Band Gap(Eg)2 entries | 0.000 | eV | — | ||
| ↳ | 0.000 | eV | — | ||
Magnetic Moment(μB) | 0.000 | µB | — |
| Property | Value | Unit | Conditions | Source | |
|---|---|---|---|---|---|
Energy Above Hull(ΔEhull) | 0.09660 | eV/atom | — | ||
Formation Energy(ΔHf) | -0.4175 | eV/atom | — |