SiH3F — Properties & Data | MatWorld

SiH3F

ceramic

· JVASP-32274· SiH3F

Fluorosilane (SiH₃F) is a silicon-based ceramic precursor compound used primarily in chemical vapor deposition (CVD) and thin-film processing rather than as a bulk structural material. This volatile organosilicon hydride is valued in semiconductor manufacturing and surface coating applications where controlled fluorine doping or silicon-fluorine interfacial layers are required to modify material properties such as hydrophobicity, dielectric constant, or chemical resistance.

semiconductor thin filmsCVD precursorfluorine-doped coatingshydrophobic surface treatmentsmicroelectronics processingresearch and development

Compliance & Regulations

?Conflict Free?RoHS?REACH?TSCA?Prop 65

Units:

si imperial

Property	Value	Unit	Conditions	Source
Density(ρ)	1.310	kg/m³	DFT · OptB88vdW

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Method

Carrier

Property	Value	Unit	Conditions
Band Gap(Eg)2 entries	5.910	eV	DFT · OptB88vdW
↳	9.221	eV	DFT · TBmBJ
High-Frequency Dielectric Constant (ε∞)(ε∞)2 entries	2.378	-	DFT · OptB88vdW
↳	1.799	-	DFT · TBmBJ
Magnetic Moment(μB)	0.000	µB	DFT · OptB88vdW
Thermoelectric Power Factor(PF)2 entries	0.00177	W/(m·K²)	DFT · OptB88vdW · n-type · 1e20 cm⁻³ · 327°C
↳	0.000642	W/(m·K²)	DFT · OptB88vdW · p-type · 1e20 cm⁻³ · 327°C
Seebeck Coefficient(S)2 entries	-209.6	μV/K	DFT · OptB88vdW · n-type · 1e20 cm⁻³ · 327°C
↳	402.4	μV/K	DFT · OptB88vdW · p-type · 1e20 cm⁻³ · 327°C
Spectroscopic Limited Maximum Efficiency (SLME)(SLME)	0.000	%	DFT · TBmBJ

N entriesMultiple entries per property — large groups are collapsed; click a summary row to expand. Use filters above to narrow by form, heat treatment, basis, or test environment.

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Property	Value	Unit	Conditions	Source
Energy Above Hull(ΔEhull)	0.01430	eV/atom	DFT · OptB88vdW
Formation Energy(ΔHf)	-0.7805	eV/atom	DFT · OptB88vdW

Verified Unverified Low confidence (<80%) Link to source

Reference data from cited sources. Not verified or certified by MatWorld Inc. Verify against the source before use in design. Terms: engineering data

Regulatory Screening

Environmental

RoHS, REACH, and Prop 65 statuses are validated against official substance lists (ECHA SVHC Candidate List, OEHHA Prop 65, RoHS Annex II). Other regulations are estimated from composition and material classification. All screening is a starting point for due diligence — always verify with your supplier before making compliance decisions.

SiH3F

Physical Properties

Electrical Properties

Other Properties

Regulatory Screening

Environmental