NF3 — Properties & Data | MatWorld

NF3

ceramic

· JVASP-127571· NF3

NF3 is a ceramic compound based on nitrogen and fluorine chemistry, representing a specialized material in the family of fluorine-containing ceramics. This material is primarily encountered in research and advanced industrial applications where its unique chemical stability and thermal properties are leveraged for demanding environments. NF3 is notable in semiconductor processing, plasma chemistry applications, and specialized corrosion-resistant coatings where fluorine-based ceramics outperform conventional oxides and nitrides in extremely corrosive or chemically aggressive conditions.

semiconductor processing equipmentplasma etch applicationscorrosion-resistant coatingsfluorine chemistry reactorshigh-purity chemical handlingadvanced ceramic research

Compliance & Regulations

?Conflict Free?RoHS?REACH?TSCA?Prop 65

Units:

si imperial

Property	Value	Unit	Conditions	Source
Density(ρ)	2.519	kg/m³	DFT · OptB88vdW

Verified Unverified Low confidence (<80%) Link to source

Property	Value	Unit	Conditions	Source
Band Gap(Eg)	0.000	eV	DFT · OptB88vdW
Magnetic Moment(μB)	0.000	µB	DFT · OptB88vdW

Verified Unverified Low confidence (<80%) Link to source

Property	Value	Unit	Conditions	Source
Energy Above Hull(ΔEhull)	0.2199	eV/atom	DFT · OptB88vdW
Formation Energy(ΔHf)	0.2160	eV/atom	DFT · OptB88vdW

Verified Unverified Low confidence (<80%) Link to source

Reference data from cited sources. Not verified or certified by MatWorld Inc. Verify against the source before use in design. Terms: engineering data

Regulatory Screening

Environmental

RoHS, REACH, and Prop 65 statuses are validated against official substance lists (ECHA SVHC Candidate List, OEHHA Prop 65, RoHS Annex II). Other regulations are estimated from composition and material classification. All screening is a starting point for due diligence — always verify with your supplier before making compliance decisions.

NF3

Physical Properties

Electrical Properties

Other Properties

Regulatory Screening

Environmental